| Year | Detail |
| 1912 |
EBARA Corporation was founded as the Inokuty Type Machinery Office by Issey Hatakeyama in 1912, initially focusing on the manufacture of pumps. |
| 1961 |
EBARA Corp. launched its first stoker-type waste incinerator and entered into the waste treatment plant business. |
| 1975 |
EBARA established the Sodegaura Plant in the city of Sodegaura, Chiba Prefecture, expanding its business in compressors and turbines. |
| 1986 |
EBARA Corp. entered into the precision machinery business with the launch of its first root-type dry vacuum pumps. |
| 2002 |
EBARA spun off its compressors and turbines business into a separate company named Elliott Ebara Turbomachinery Corp. |
| 2012 |
Three companies, Ebara Technoserve Co., Ltd., Ebara Yoshikura Hydro-Tech Co., Ltd., and Ebara Environmental Technologies Hokkaido Co., Ltd., merged to establish EBARA Corp. |
| 2015 |
EBARA Corp. acquired PT Turbindo Chikara Surya, an Indonesian company that provides maintenance services for rotating machinery. |
| 2023 |
EBARA Corp. developed a hydrogen-fueled absorption chiller-heater, a heat source machine used to provide comfortable air-conditioned spaces in office buildings, factories, airports, commercial facilities, district heating and cooling facilities, and other locations. |
| 2024 |
EBARA Corp. established a new equipment testing and development center for hydrogen infrastructure, designed for full-scale commercial product testing of liquid hydrogen pumps. |