| Year | Detail |
| 1947 |
The company was established in Chuo-ku, Tokyo, as Hinode Shokai Co., Ltd. |
| 1960 |
The company established a New York branch office (now Hitachi High-Tech America, Inc.) to expand globally. |
| 1960 |
The company established a Dusseldorf branch office (now Hitachi High-Tech Europe GmbH). |
| 1964 |
Hitachi High-Tech Corp. established a Hong Kong representative office (now Hitachi High-Tech Hong Kong Ltd.). |
| 1972 |
The company established Nissei Sangyo Brazil (now Hitachi High-Tech do Brasil Ltda). |
| 2001 |
The company's name changed to Hitachi High-Technologies Corporation following the integration of Hitachi's Instruments Group and Semiconductor Manufacturing Equipment Group; Hitachi Science Systems, Ltd., Hitachi Naka Electronics Co., Ltd., and Naka Instruments Co., Ltd. (now Hitachi High-Tech Manufacturing & Service Corporation) were made subsidiaries. |
| 2003 |
SANYO High Technology Co., Ltd. (now Hitachi High-Tech Instruments Co., Ltd.) and SANYO High-Tech Service Co., Ltd. (now Hitachi High-Tech Instruments Service Co., Ltd.) were made subsidiaries. |
| 2007 |
Hitachi High Tech DE Technology name changed to Hitachi High-Tech Engineering Service Corporation (now Hitachi High-Tech Fine Systems Corporation). |
| 2010 |
Hitachi High-Tech Instruments Co., Ltd. merged with the semiconductor manufacturing equipment business of Renesas Eastern Japan Semiconductor, Inc. |
| 2013 |
Hitachi High-Tech Science Corporation merged design and development, quality assurance, and the domestic sales division of Hitachi High-Tech's analytical instruments business. |
| 2019 |
The company acquired Applied Physics Technologies, Inc., a U.S. Manufacturer of Electron Sources. Hitachi High-Tech conducted research and development activities at APTech focused on electron source-related technologies. |
| 2022 |
Hitachi High-Tech Fine Systems Corporation transferred its railway inspection, HD/FPD, and laboratory solutions businesses to Hitachi High-Tech Solutions Corporation and its manufacturing (manufacturing functions) to Hitachi High-Tech Manufacturing & Service Corporation. The latter merged with Hitachi High-Tech Corporation as the surviving company and dissolved. |
| 2024 |
Hitachi, Ltd.'s healthcare business was transferred to Hitachi High-Tech Corporation through a company split. |