Tokyo Electron Ltd.

Products

Category Product Brand Description
Semiconductor Machinery Manufacturing (MFG067B)
TELINDY
TELINDY PLUS: Batch thermal processing system designed for 300mm wafers that ensure superior performance., TELINDY PLUS IRad: Batch thermal ALD system, compatible with 300mm wafers, combines plasma-enhanced processing with TELINDY PLUS platform, with advanced deposition capabilities.
TELFORMULA
TELFORMULA: Batch thermal processing system made for 300mm wafers, equipped with cutting-edge technologies aimed at reducing turnaround time while accommodating various applications.
ALPHA-8S i
ALPHA-8S i: Vertical batch thermal processing and deposition system for 150/200mm wafers, ensuring improved functionality, ease of operation, stability, and compliance with international safety standards.

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