| Year | Detail |
| 1952 |
Japan Vacuum Engineering Co., Ltd. was founded for the purpose of importing and selling various types of vacuum equipment. |
| 1955 |
Established the Omori Plant to start manufacturing equipment in Japan. |
| 1956 |
Merged with Toyo Seiki Vacuum Research Corporation and started manufacturing standard goods such as vacuum chemical processing equipment and vacuum pumps at the Amagasaki Plant. |
| 1959 |
The Head Office and Omori Plant were moved to Yokohama City. |
| 1961 |
Started the vacuum metallurgy business by making use of the basics of vacuum technologies. |
| 1962 |
Established Vacuum Materials, Inc. (the company name was changed to ULVAC Materials, Inc.) to start selling fire-resistant materials. Established SHINKU-RIKO Inc. (currently ADVANCE RIKO, Inc.) as a specialist manufacturer of thermal analyzers. |
| 1963 |
The company was absorbed into SHINSEI SANGYO Inc. (founded on September 20, 1929). The company name was changed to Japan Vacuum Engineering Co., Ltd. on the merger day to continue business operations of the former Japan Vacuum Engineering Co., Ltd. |
| 1964 |
Established Hong Kong ULVAC Co., Ltd. and Separated the Reliance Department of the Overseas Division and established Reliance Electric Limited, which was jointly invested in by Reliance Electric and Engineering Co., a U.S. company. |
| 1966 |
It has established Vacuum Metallurgical Co., Ltd. by spinning off the ULVAC Vacuum Metallurgical Department. |
| 1968 |
The Head Office and Yokohama Plant were moved to Chigasaki City. |
| 1970 |
Established Sanwa ULVAC Sales, Inc. (the company name was changed to ULVAC Higashi Nippon Co., Ltd.), a special agent that made exclusive use of our products. |
| 1971 |
The company was established by SHINKU KIKO Inc. (currently ULVAC KIKO Inc.) as a specialist manufacturer of compact vacuum pumps. |
| 1972 |
It has established the Institute for Super Materials in Chiba. |
| 1975 |
Established ULVAC North America Corp. (currently, ULVAC Technologies, Inc.), a subsidiary in North America, as a base for export to the U.S. |
| 1977 |
Established KYUSYU ULVAC CORPORATION (currently, ULVAC KYUSHU CORPORATION) to expand sales activities in the Kyushu area. |
| 1979 |
Separated the Service Department to establish ULVAC SERVICE CORPORATION and Separated the SI Division to establish ULVAC COATING CORPORATION. |
| 1981 |
Established ULVAC CRYOGENICS INCORPORATED, a company co-founded with Helix Technology Corp., a U.S. company. |
| 1982 |
Established the Tsukuba Institute for Super Materials in Tsukuba Science City (currently Tsukuba City), Ibaraki Prefecture. Established ULVAC TAIWAN Co., Ltd. (currently, ULVAC TAIWAN INC.) in Taipei City, Taiwan. Established ULVAC-PHI, Inc., a company jointly invested in by U.S. company PerkinElmer Inc. |
| 1983 |
Set up the Beijing Office in Beijing, China. |
| 1985 |
Established ULVAC Seiki Co., Ltd. as a base plant in the Kansai area. |
| 1987 |
Changed the company name in English to ULVAC Japan, Ltd. and established ULVAC TOHOKU, Inc. in Hachinohe City, Aomori Prefecture, to strengthen large equipment production. Established ULVAC GmbH in West Germany to improve services in Europe. Established ULVAC CORPORATE CENTER Ltd. to support group companies. |
| 1988 |
Established Kyushu Vacuum Engineering Co., Ltd. in Kagoshima to mass produce vacuum pumps. |
| 1990 |
Established the Fuji Susono Plant in Susono City, Shizuoka Prefecture, to improve chip-making equipment. |
| 1991 |
Kyushu Vacuum Engineering Co., Ltd. merged with ULVAC Seiki Co., Ltd. The company name was changed to ULVAC Seiki Co., Ltd. |
| 1994 |
ULVAC SERVICE CORPORATION merged with ULVAC Materials, Inc. The company name was changed to ULVAC TECHNO, Ltd. |
| 1995 |
Established ULVAC KOREA, Ltd. in Seoul, South Korea, and Established ULVAC (NINGBO) Co., Ltd., a joint venture with Ningbo C.S.I. Power & Machinery Group Co., Ltd., in China. |
| 1998 |
Set up the Singapore CS Center and the Taiwan Hsinchu R&D Center to expand the network in Asia. |
| 2000 |
Constructed the Pyeongtaek Plant as a production plant of ULVAC KOREA, Ltd. |
| 2001 |
Changed the company name to ULVAC, Inc. and Established the Taoyuan CIP Plant of ULVAC TAIWAN INC. to improve customer support. |
| 2002 |
ULVAC Higashi Nippon Co., Ltd. merged with Takayama ULVAC Co., Ltd. and changed the company name to ULVAC EQUIPMENT SALES, Inc. Established ULVAC SINGAPORE PTE LTD to improve customer support. Acquired stocks (50%) of ULVAC-PHI, Inc. that Physical Electronics USA, Inc., a U.S. company, owned in order to wholly own ULVAC-PHI, Inc. |
| 2003 |
Constructed a seamless plant for machining, surface treatment, and precision wet cleaning by ULVAC TOHOKU, Inc., ULVAC TECHNO, Ltd., and ULVAC Materials Technology Co., Ltd. in the Tohoku area. Acquired stocks (31%) of Reliance Electric Limited from RELIANCE ELECTRIC COMPANY in the U.S. to increase the share to 81%. Established ULVAC (SUZHOU) CO., LTD. as a full-scale production and CS solution plant in China. Acquired stocks (50%) of Litrex Corporation, which manufactured and sold industrial inkjet printers. |
| 2004 |
ULVAC KOREA, Ltd. and ULVAC TOHOKU, Inc. jointly founded Ulvac Korea Precision, Ltd. in South Korea to manufacture large-substrate vacuum parts. ULVAC KOREA, Ltd. and Vacuum Metallurgical Co., Ltd. jointly founded Pure Surface Technology, Ltd. in South Korea for surface treatment of parts used for film deposition equipment. |
| 2006 |
Established ULVAC Research Center KOREA, Ltd. in South Korea for research and development. Established ULVAC Research Center TAIWAN, Inc. in Taiwan for research and development. |
| 2007 |
The company name of ULVAC-TTI Technology (Shanghai) Corporation was changed to ULVAC Automation Technology (Shanghai) Corporation with the transfer of the stocks owned by TAIWAN DEVELOPMENT CO., LTD. |
| 2008 |
ULVAC TAIWAN INC. merged with ULVAC Taiwan Manufacturing Corporation to streamline business operations in Taiwan, with ULVAC TAIWAN INC. as the surviving company. |
| 2009 |
Established ULVAC Materials (Suzhou) CO., LTD in China to manufacture sputtering targets and for bonding and Established ULVAC Research Center SUZHOU Co., Ltd. in China for research and development. |
| 2010 |
Acquired ULVAC Materials, Inc. The service, wet cleaning, and surface treatment businesses of ULVAC KYUSHU CORPORATION were transferred to ULVAC TECHNO, Ltd. In addition, ULVAC KYUSHU CORPORATION acquired ULVAC Seiki Co., Ltd. |
| 2011 |
Established the South Korea Institute for Super Materials as a research institute attached to ULVAC KOREA, Ltd. to enhance research and development in South Korea. |
| 2012 |
ULVAC CORPORATE CENTER Ltd. was dissolved. The business was handed over to us. |
| 2014 |
ULVAC Research Center TAIWAN, Inc. was dissolved. The business was handed over to ULVAC TAIWAN INC. Established ULVAC VACUUM EQUIPMENT (SHANGHAI) CO.,LTD in China to stock and sell imported parts under bond. |
| 2015 |
Established the Future Technology Research Laboratory. ULVAC ENGINEERING, Inc. was dissolved. |
| 2016 |
The company had taken over ULVAC Vacuum Furnace (Shenyang) Co., Ltd. (currently, ULVAC (Shenyang) Co., Ltd. |
| 2017 |
ULVAC Vacuum Furnace (Shenyang) Co., Ltd. changed its company name to ULVAC (Shenyang) Co., Ltd. |
| 2018 |
Established ULVAC Coating Technology (HEFEI) Co., Ltd. in China to manufacture, process, and sell mask blanks for flat panel displays. |
| 2019 |
Reliance Electric Limited changed the company name to REJ Co., Ltd. |