Lam Research Corp.

History

Year	Detail
1980	Lam Research was founded in 1980 by David K. Lam and is headquartered in Fremont, California.
1981	The company introduced its first product, the AutoEtch 480, an automated polysilicon plasma etcher. The name AutoEtch was chosen to convey that the etcher was automated.
1987	The company introduced its first Rainbow etch product, a piece of equipment representing the most advanced chip manufacturing technology.
1990	The company introduced SP Series spin clean systems.
1993	The company released Concept Two ALTUS CVD tungsten system.
1995	The company introduced the first dual-frequency confined dielectric etch product.
2002	The company opened a campus in Tualatin, Oregon, expanding its engineering and manufacturing infrastructure; the facility was designed to produce copper metallization and damascene dielectric deposition tools.
2003	The company launched Da Vinci's spin-clean product based on Lam's pioneering single-wafer spin-clean technology.
2004	The company introduced ALTUS tungsten barrier CVD, a single-system solution that meets contact and via-fill needs at 65 nm and below.
2006	The company acquired Bullen Ultrasonics' (now Silfex, Inc.) silicon growing and fabrication assets for approximately $175 million in cash.
2008	The company acquired SEZ AG (currently known as Lam Research AG), a provider of single-wafer wet-clean processing solutions for the semiconductor industry.
2012	The company acquired Novellus Systems, a semiconductor equipment manufacturer, in an all-stock transaction valued at approximately $3.3 billion.
2016	The company opened the Lam Research Dr. Richard A. Gottscho Laboratory in Fremont.
2017	The company acquired Coventor Inc., a provider of simulation and modeling solutions for semiconductor process technology, micro-electromechanical systems (MEMS), and the Internet of Things (IoT).
2021	The company opened a manufacturing facility in Penang's Batu Kawan, Malaysia.
2022	The company opened Lam Research Korea Technology Center, an advanced research and development (R&D) facility for semiconductor equipment and process technology.