Lam Research Corp.

Products

Category

Product

Brand

Description

Semiconductor Machinery Manufacturing (MFG067B)

ALTUS		All the products fall under ALTUS systems integrate CVD and ALD technologies to apply precisely conformal films necessary for tungsten metallization applications. Concept Two ALTUS; ALTUS Max; ALTUS Max ExtremeFill; ALTUS DirectFill Max; ALTUS Max ICEFill; ALTUS LFW
Pulses		Pulsus PLD products facilitate large-scale production of >30% ScAlN films made for specialty technologies applications. This deposition solution empowers enhanced device design and is used for applications including RF filters for 5G and WiFi 6, sophisticated MEMS microphones, and various other MEMS applications.
Reliant		The products fall under Reliant product family used for markets such as micro-electromechanical systems (MEMS) and power devices, the numerous feature shapes and different materials involve additional manufacturing requirements. Concept Two ALTUS (200 mm); Concept Two SEQUEL (200 mm, 150 mm); Concept Two SPEED (200 mm); Pulsus; SPEED Max (300 mm); VECTOR (300 mm, 200 mm)

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